Handbook of Photomask Manufacturing Technology

Handbook of Photomask Manufacturing Technology

2005 | ISBN-10: 0824753747 | 728 Pages | PDF | 22 MB

As the semiconductor industry attempts to increase the number of functions that will fit into the smallest space on a chip, it becomes increasingly important for new technologies to keep apace with these demands. Photomask technology is one of the key areas to achieving this goal. Although brief overviews of photomask technology exist in the literature, the Handbook of Photomask Manufacturing Technology is the first in-depth, comprehensive treatment of existing and emerging photomask technologies available.

The Handbook of Photomask Manufacturing Technology features contributions from 40 internationally prominent authors from industry, academia, government, national labs, and consortia. These authors discuss conventional masks and their supporting technologies, as well as next-generation, non-optical technologies such as extreme ultraviolet, electron projection, ion projection, and x-ray lithography. The book begins with an overview of the history of photomask development. It then demonstrates the steps involved in designing, producing, testing, inspecting, and repairing photomasks, following the sequences observed in actual production. The text also includes sections on materials used as well as modeling and simulation.

Continued refinements in the photomask-making process have ushered in the sub-wavelength era in nanolithography. This invaluable handbook synthesizes these refinements and provides the tools and possibilities necessary to reach the next generation of microfabrication technologies.



[Fast Download] Handbook of Photomask Manufacturing Technology

Ebooks related to "Handbook of Photomask Manufacturing Technology" :
Parallel Power Electronics Filters in Three-Phase Four-Wire Systems: Principle, Control and Design
Thermal Transport in Strongly Correlated Rare-Earth Intermetallic Compounds
Signal Integrity: Applied Electromagnetics and Professional Practice
Romansy 13: Theory and Practice of Robots and Manipulators
Stretchable Bioelectronics for Medical Devices and Systems (Microsystems and Nanosystems)
Autonomous Robots and Agents
Lasermesstechnik: Diagnostik der Kurzzeitphysik

Engineering Circuit Analysis, 7th Edition
Copyright Disclaimer:
This site does not store any files on its server. We only index and link to content provided by other sites. Please contact the content providers to delete copyright contents if any and email us, we'll remove relevant links or contents immediately.