MEMS Reliability



Allyson L. Hartzell, Mark G. da Silva, and Herbert R. She, "MEMS Reliability"
Spr,,ger | 2010 | ISBN: 1441960171 | 291 pages | File type: PDF | 10,3 mb

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it.

MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

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