Micro Electronic and Mechanical Systems



Kenichi Takahata , quot;Micro Electronic and Mechanical Systemsquot;
In-Tech | 2009 | ISBN-10: N/A | ISBN-13: 9789533070278 | 386 pages | File type: PDF | 35,4 mb
This book discusses key aspects and the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.
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